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US 6,644,855 B2Granted
Stage device, exposure apparatus, device manufacturing method and movement guidance method
AssigneeCanon Kabushiki Kaisha
InventorsShigeo Sakino, Mitsuru Inoue, Tadayuki Kubo
Life of this patent
Estimating the term…
Abstract
A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.
Claims47
A stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a driving body movable along the first direction;
- a moving body movable along the second direction with respect to said driving body;
- a static pressure bearing provided on said moving body;
- an exhaust groove provided surrounding said static pressure bearing;
- and
- a mechanism for delivering a gas of said static pressure bearing recovered by said exhaust groove between said moving body and said driving body.
4 more elements
A stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a first driving body movable along the first direction;
- a second driving body movable along the second direction;
- a moving body movable along the second direction with respect to said first driving body, movable along the first direction with respect to said second driving body, and movable along the reference plane;
- a first radial bearing unit for supporting said first driving body movably in the first direction;
- a first plane bearing unit for restraining said first driving body vertically;
- a second radial bearing unit for supporting said second driving body movably in the second direction;
- and
- a second plane bearing unit for restraining said second driving body vertically.
6 more elements
An exposure apparatus having a stage device for mounting a wafer and positioning the wafer at an exposure position, said stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a driving body movable along the first direction;
- a moving body movable along the second direction with respect to said driving body;
- a static pressure bearing provided on said moving body;
- an exhaust groove provided surrounding said static pressure bearing;
- and
- a mechanism for delivering a gas of said static pressure bearing recovered by said exhaust groove between said moving body and said driving body.
4 more elements
A device manufacturing method comprising the steps of:
- coating a substrate with a photoresist;
- exposing the substrate using an exposure apparatus;
- and
- developing the substrate that has been exposed;
- wherein said exposure apparatus has a stage device for mounting a wafer and positioning the wafer at an exposure position, said stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a driving body movable along the first direction;
- a moving body movable along the second direction with respect to said driving body;
- a static pressure bearing provided on said moving body;
- an exhaust groove provided surrounding said static pressure bearing;
- and
- a mechanism for delivering a gas of said static pressure bearing recovered by said exhaust groove between said moving body and said driving body.
9 more elements
A device manufacturing method comprising the steps of:
- coating a substrate with a photoresist;
- exposing the substrate using an exposure apparatus;
- and
- developing the substrate that has been exposed;
- wherein said exposure apparatus has a stage device for mounting a wafer and positioning the wafer at an exposure position, said stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a first driving body movable along the first direction;
- a second driving body movable along the second direction;
- a moving body movable along the second direction with respect to said first driving body, movable along the first direction with respect to said second driving body, and movable along the reference plane;
- a first radial bearing unit for supporting said first driving body movably in the first direction;
- a first plane bearing unit for restraining said first driving body vertically;
- a second radial bearing unit for supporting said second driving body movably in the second direction;
- and
- a second plane bearing unit for restraining said second driving body vertically.
11 more elements
A movement guidance method comprising the steps of:
- establishing negative pressure in a recovery passage provided in a table;
- establishing negative pressure in a groove of a delivery member provided between a driving body, which is movable in a first direction, and the table;
- establishing negative pressure in a recovery passage provided in the driving body;
- establishing negative pressure in a groove of a delivery member provided between a moving body, which is movable in a second direction with respect to the driving body, and the driving body;
- and
- establishing negative pressure in an exhaust groove surrounding a static pressure bearing provided on the moving body.
3 more elements
A movement guidance method comprising the steps of:
- recovering gas from a static pressure bearing, which is provided on a moving body, by an exhaust groove provided surrounding the static pressure bearing;
- delivering the gas from the static pressure bearing recovered by the exhaust groove to a driving body via a delivery member provided between the driving body, which drives the moving body in a first direction, and the moving body;
- passing the recovered gas through a recovery passage provided in the driving body;
- delivering the recovered gas to a table via a delivery member provided between the driving body and the table;
- and
- exhausting the recovered gas via a recovery passage provided in the table.
3 more elements
An exposure apparatus having a stage device for mounting a wafer and positioning the wafer at an exposure position, said stage device comprising:
- a table having a reference plane parallel to first and second directions;
- a first driving body movable along the first direction;
- a second driving body movable along the second direction;
- a moving body movable along the second direction with respect to said first driving body, movable along the first direction with respect to said second driving body, and movable along the reference plane;
- a first radial bearing unit for supporting said first driving body movably in the first direction;
- a first plane bearing unit for restraining said first driving body vertically;
- a second radial bearing unit for supporting said second driving body movably in the second direction;
- and
- a second plane bearing unit for restraining said second driving body vertically.
6 more elements
Dependencies are inferred from the claim text.