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US 6,644,533 B2Granted
Force sensing apparatus
AssigneeAsm Technology Singapore Pte Ltd
InventorsGang Ou, Gary Peter Widdowson, Ka Shing Kenny Kwan
Life of this patent
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Abstract
Force sensing apparatus is provided for sensing deflection of a transducer in an ultrasonic welding machine. The apparatus includes a body member, a transducer holder and a force sensor. The transducer holder is adapted to hold an ultrasonic transducer and the transducer holder is fixed to the body member. The force sensor is located between adjacent surfaces of the body member and the transducer holder to sense a force applied between the surfaces.
Claims6
A method of compensating a force sensor for performance variations in the sensor, the method comprising:
- (a) at the beginning of a time interval taking a first reference reading from the sensor with a reference force applied to the sensor;
- (b) using the first reference reading as a reference for readings from the sensor during the time the interval to obtain an indication of an unknown force applied to the sensor;
- and
- after the end of the time interval repeating steps (a) and (b) for another time interval.
1 more element
Dependencies are inferred from the claim text.