Pressure sensor
AssigneeImpella Cardiotechnik Aktiengesellschaft
InventorsThorsten Siess, Christoph Nix
Life of this patent
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Abstract
The invention relates to a pressure sensor consisting of a chip (11) which is mounted on a support wall (10) and which is provided with a resistance unit consisting of strip conductors and being arranged at the lower side (13) of a substrate (12). Said lower side faces the support wall (10). The resistance unit is located on a thin membrane (18). A recess (19) is located behind said membrane. The chip (11) is fixed on the support wall (10) by means of an elastic intermediate layer (26). The electrical components of the chip are protectively arranged between the substrate (12) and the support wall (10). The invention provides for an extremely flat sensor unit without additional sensor housing. Said sensor unit can even be used for measuring pressures in electrically conductive mediums.
Claims9
A pressure sensor comprising a resistance unit having strip conductors that are arranged on a planar side of a substrate, a support wall to which the substrate is attached such that said planar side of the substrate on which the resistance unit is provided faces the support wall, wherein the support wall has a pressure transmitting opening formed therein, and an elastic intermediate layer arranged between the support wall and the substrate, wherein contact surfaces are provided on the planar side of the substrate bearing the resistance unit and wherein the contact surfaces are planarly connected to connecting wires that plunge into a cutout that is formed in the surface of the support wall that faces the substrate.
Dependencies are inferred from the claim text.