Substrate cleaning apparatus

A substrate cleaning apparatus for cleaning a rotating substrate having a top surface and a peripheral edge, said substrate cleaning apparatus comprising:

• a chuck mechanism for chucking the substrate for supporting and rotating the substrate;
• a scrub cleaning tool for cleaning the substrate by being brought into contact with the substrate? wherein said scrub cleaning tool has a bottom surface for cleaning the top surface of the substrate and a side surface for cleaning the peripheral edge of the substrate;
• a swing mechanism for swinging said scrub cleaning tool on the substrate;
• and
• a cleaning tool vertical driving mechanism for moving said scrub cleaning tool,from a position where said scrub cleaning tool is in contact with the top surface of the substrate to another position where said scrub cleaning tool is in contact with the peripheral edge of the substrate, by vertically moving said scrub cleaning tool.

A substrate cleaning apparatus for cleaning a rotating substrate having a top surface and a peripheral edge, said substrate cleaning apparatus comprising:

• a chuck mechanism for chucking the substrate for supporting and rotating the substrate;
• a scrub cleaning tool for cleaning the substrate by being brought into contact with the substrate;
• a liquid spray nozzle for cleaning the substrate by spraying a cleaning liquid to the substrate;
• a swing mechanism for simultaneously swinging both of said scrub cleaning tool and said liquid spray nozzle to and above the substrate;
• and
• a cleaning tool vertical driving mechanism for moving said scrub cleaning tool to at least three positions where said scrub cleaning tool is in contact with the top surface of the substrate, said scrub cleaning tool is apart from the substrate, and said scrub cleaning tool is sprayed by the cleaning liquid from said liquid spray nozzle for cleaning said scrub cleaning tool, by vertically moving said scrub cleaning tool.