Waveguide-arrayed optical wavelength multiplexer/demultiplexer and fabrication method of the same

A waveguide-arrayed optical wavelength multiplexer/demultiplexer comprising, on a base:

• a plurality of input waveguides for inputting wavelength division multiplexed optical signals;
• an output waveguide for combining the wagelength division multiplexed optical signals to be output;
• a waveguide array constituted with a plurality of arrayed waveguides having predetermined waveguide length differences;
• an input waveguide slab for interconnecting the plurality of input waveguides and the waveguide array;
• and
• an output waveguide slab for interconnecting the waveguide array and the output waveguide;
• wherein one of the input waveguide slab and the output waveguide slab is configured to have a refractivity distribution;
• wherein said one of the input waveguide slab and the output waveguide slab is configured with the refractivity distribution partially changed by an ultraviolet laser to have an intended refractivity change;
• wherein said one of the input waveguide slab and the output waveguide slab is configured to have the refractivity distribution and the intended refractivity change by irradiating a portion of said one of the input waveguide slab and the output waveguide slab to be high of refractivity with one of an ArE eximer laser and a KrF eximer laser, subject to a masking over a remainder of the portion of said one of the input waveguide slab and the output waveguide slab.

A manufacturing method of a waveguide-arrayed optical wavelength multiplexer/demultiplexer comprising, on a base:

• a plurality of input waveguides for inputting wavelength division multiplexed optical signals;
• an output waveguide for combining the wagelength division multiplexed optical signals to be output;
• a waveguide array constituted with a plurality of arrayed waveguides having predetermined waveguide length differences;
• an input waveguide slab for interconnecting the plurality of input waveguides and the waveguide array;
• and
• an output waveguide slab for interconnecting the waveguide array and the output waveguide;
• wherein one of the input waveguide slab and the output waveguide slab is configured to have refractivity distribution;
• wherein said one of the input waveguide slab and the output waveguide slab is configured with the refractivity distribution partially changed by an ultraviolet laser to have an intended refractivity change.

A manufacturing method of a waveguide-arrayed optical wavelength multiplexer/demultiplexer comprising, on a base:

• a plurality of input waveguides for inputting wavelength division multiplexed optical signals;
• an output waveguide for combining the wavelength division multiplexed optical signals to be output;
• a waveguide array constituted with a plurality of arrayed waveguides having predetermined waveguide length differences;
• an input waveguide slab for interconnecting the plurality of input waveguides and the waveguide array;
• an output waveguide slab for interconnecting the waveguide array and the output waveguide;
• wherein one of the input waveguide slab and the output waveguide slab is configured to have refractivity distribution;
• and
• wherein said one of the input waveguide slab and the output waveguide slab is configured with the refractivity distribution partially changed by an ultraviolet laser to have an intended refractivity change;
• wherein said one of the input waveguide slab and the output waveguide slab is configured to have the refractivity distribution and the intended refractivity change by irradiating a portion of said one of the input waveguide slab and the output waveguide slab to be high of refractivity with one of an ArF eximer laser and a KrF eximer laser, subject to a masking over a remainder of the portion of said one of the input waveguide slab and the output waveguide slab.