Mechanically assisted release for MEMS optical switch
AssigneeCorning Incorporated
InventorTerrance G. McDonald
Life of this patent
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Abstract
An optical switch is disclosed that includes a pixel member that moves between a quiescent switch state and an active switch state. An assisted-release mechanism is coupled to the pixel member. It applies a force to the pixel member in the active switch state to enhance the response time of the switch when being reset to the quiescent switch state.
Claims23
An optical switch for directing at least one light signal, the optical switch including an optical substrate having at least one trench formed at the intersection of at least one first waveguide and at least one second waveguide, and an electrical substrate coupled to the optical substrate, the electrical substrate having at least one actuator disposed opposite to the at least one trench, the optical switch comprising:
- at least one pixel coupled to the optical substrate and interposed between the trench and the actuator, the at least one pixel moving between a first quiescent switch state and a second active switch state and wherein the at least one pixel further comprises:
- a plate coupled to the optical substrate, the plate being interposed between the trench and the actuator;
- and
- a reflector connected to the plate;
- and
- an assisted-release mechanism coupled to the pixel member, the assisted-release mechanism applying a force to the pixel member in the second active state_wherein the assisted-release mechanism further comprises:
- at least one landing post disposed on the electrical substrate, the landing post engaging the pixel in the second switch state;
- and at least one flexure spring coupled to the pixel, the flexure spring being deflected by the landing post in the second state to thereby store mechanical energy.
A method for switching a light signal in an optical switch, the optical switch including a pixel movable between a light redirecting state and a non-redirecting state, and an actuator that applies a force to the pixel to thereby move the pixel from the redirecting state to the non-redirecting state, the method comprising the steps of:
- providing an assisted-release mechanism;
- pressing the assisted-release mechanism to the pixel member in the non-redirecting state to thereby store potential energy;
- and
- releasing the potential energy when the actuator ceases to apply the force to the pixel, whereby the assisted-release mechanism urges the pixel to move from the non-redirecting state to the redirecting state;
- and
- wherein the step of providing further comprises the steps of providing a landing post juxtaposed to an electrode, the landing post directly contacting the pixel in the non-redirecting state, and providing a flexure spring coupled to the pixel.
Dependencies are inferred from the claim text.