Microoptoelectromechanical system (MOEMS) based laser
AssigneeUT Battelee, LLC
InventorDonald P. Hutchinson
Life of this patent
Estimating the term…
Abstract
A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.
Claims25
A laser device, comprising:
- a waveguide substrate, said waveguide having a plurality of micromachined intersecting folded waveguide paths,
- a single fold mirror means having a plurality of facets bounding all ends of said waveguide paths except those reserved for resonator mirrors;
- a pair of resonator minors attached to opposite sides of said waveguide to form a lasing cavity;
- a lasing material in said lasing cavity, and
- structure for sealing a top of said waveguide substrate.
A method for forming a folded laser device, comprising the steps of:
- providing a waveguide substrate;
- etching said waveguide substrate to form a folded wave guide structure including a plurality of intersecting folded wave guide paths in said waveguide substrate;
- forming a single fold mirror means having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors;
- disposing a pair of resonator mirrors on opposite sides of said waveguide to form a lasing cavity;
- providing a lasing material in said lasing cavity, and
- sealing a to of said wave aide substrate.
A meted for processing an electromagnetic signal which comprises utilizing:
- a folded laser device, said folded laser device including a waveguide substrate, said waveguide having a plurality of micromachined intersecting folded waveguide paths;
- a single fold mirror means having a plurality of facets bounding all ends of said waveguide paths except those reserved for resonator mirrors;
- a pair of resonator mirrors attached to opposite sides of said waveguide to form a lasing cavity,
- a lasing material in said lasing cavity,
- and structure for sealing the top of said waveguide substrate,
- wherein said utilizing is at least one selected from the group consisting of LIDAR, communication systems, chemical detection and military target designators.
Dependencies are inferred from the claim text.