Ferro-electric capacitor and method of fabrication of the ferro-electric capacitor
AssigneeInteruniversitair Microelektronica Centrum
InventorsGerd Norga, Dirk Wouters
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Abstract
A ferro-electric capacitor comprising a first electrode comprising at least a layer of a conductive oxide having at least two sub-layers of individual grains, wherein individual grains of a top sub-layer of the two sub-layers are oriented randomly. The capacitor further comprises a second electrode that is isolated from said first electrode. The capacitor further comprises a ferro-electric PZT layer that is sandwiched between said first electrode and said second electrode. A method of making the ferro-electric capacitor is also provided.
Claims14
A ferro-electric capacitor comprising:
- a first electrode comprising at least a layer of a conductive oxide having at least two sub-layers of individual grains, wherein individual grains of a top sub-layer of the two sub-layers are oriented randomly;
- a second electrode that is isolated from said first electrode;
- and
- a ferro-electric PZT layer that is sandwiched between said first electrode and said second electrode.
A method of growing a PZT layer on a conductive oxide layer formed on a substrate, the method comprising:
- forming at least two sub-layers of individual grains to comprise said oxide layer;
- causing the top sub-layer of the two sub-layers to have a random orientation;
- and
- placing a PZT layer between the two sub-layers and an electrode that is isolated from the two sub-layers.
Dependencies are inferred from the claim text.