Transducer formed on a sacrificial metal substrate
AssigneeSeagate Technology LLC
InventorsWayne A. Bonin, Zine-Eddine Boutaghou, Roger L. Hipwell, Jr., Barry D. Wissman, Lee Walter
Life of this patent
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Abstract
A transducer assembly in which an electric current is passed through plating solution in recesses of a metal substrate to plate electrical contact bumps having bump fronts in the recesses and exposed bump backs. The transducer is partially formed on the substrate, sealing the exposed bump backs. One or more vacuum processes are performed to complete formation of the transducer. At least a portion of the metal substrate is etched away to expose the bump fronts of the electrical contact bumps.
Claims16
A partially completed transducer assembly, comprising:
- a substrate formed of metal and including a sacrificial portion;
- electroplated contact bumps in recesses in the sacrificial portion of the substrate, the contact bumps having bump fronts in the recesses and exposed bump backs, the contact bumps including a sealing layer on the bump fronts;
- and
- a transducer formed on the substrate, the transducer sealing the exposed bump backs.
A partially completed transducer assembly, comprising:
- a substrate formed of metal and including a sacrificial portion;
- recesses in the sacrificial portion of the substrate;
- electroplated contact bumps on the substrate, the contact bumps having bump fronts in the recesses and exposed bump backs;
- means for sealing the bump fronts;
- and
- a transducer formed on the substrate, the transducer sealing the exposed bump backs.
A partially completed transducer assembly, comprising:
- a substrate formed of metal and including a sacrificial portion;
- a transducer having a plurality of contact bumps, the contact bumps having bump backs that are in the transducer and bump fronts that extend into recesses in the sacrificial portion;
- a sealing layer on the exposed bump fronts;
- and
- the bump fronts having protruding shape adapted for affixing to contact pads of a flexible printed circuit.
Dependencies are inferred from the claim text.