Aluminum reflecting mirror and method of making the same
AssigneeFuji Photo Optical Co., Ltd.
InventorsKunio Kurobe, Susumu Aihara
Life of this patent
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Abstract
Within a chamber in a vacuum atmosphere, SiO is deposited on a glass substrate so as to form a first layer as a protective film, Al is deposited on the first layer so as to form a second layer as an aluminum reflective film, MgF2 is deposited on the second layer so as to form a third layer as a transparent protective film, and CeO2 is deposited on the third layer so as to form a fourth layer as a transparent protective film. Then, while O2 gas is introduced into the chamber, SiO2 is deposited on the fourth layer so as to form a fifth layer as a transparent protective film.
Claims2
An aluminum reflecting mirror in which first to fifth layers are laminated on a glass substrate successively from said glass substrate side;
- wherein said first layer is a protective film formed by depositing SiO, said second layer is an aluminum reflective film formed by depositing Al, said third layer is a transparent protective film formed by depositing MgF2 and comprised of a two-layer structure composed by a lower layer formed by lower-temperature deposition and an upper layer formed by a higher-temperature deposition, wherein said lower-temperature deposition is carried out at a temperature sufficient to prevent said aluminum reflective film from lowering its reflectivity and said higher-temperature deposition is carried out at a temperature to strengthen said third layer, said fourth layer is a transparent protective film formed by depositing CeO2, and said fifth layer is a transparent protective film formed by depositing SiO2.
Dependencies are inferred from the claim text.