Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics

An optical function generator, wherein the optical function generator is a femtosecond pulse shaper, comprising:

• a diffraction grating, wherein the diffraction grating disperses an input pulse into a dispersed spectrum;
• a lens assembly;
• a micromirror array;
• and
• a plurality of actuators movably coupled to the micromirror array, wherein an actuator of the plurality of actuators can move a mirror of the micromirror array in both elevation and tilt;
• wherein the actuator includes:
• a first movable comb fixedly coupled to a first edge of a micromirror within the linear array of movable micromirrors, and
• a second movable comb fixedly coupled to a second edge opposite of the first edge of the micromirror,
• wherein the first movable comb and the second movable comb form a movable portion of an interdigitated actuator;
• and
• wherein the lens assembly focuses the dispersed spectrum onto the micromirror array, and wherein the micromirror array provides spatial filtering to the dispersed spectrum to provide a filtered spectrum.

A two-dimensional coherent mirror array, comprising:

• a two-dimensional micromirror array;
• and
• a plurality of actuators movably coupled to the two-dimensional micromirror array, wherein a micromirror of the two-dimensional micromirror array is movably coupled to a triad of actuators of the plurality of actuators, and wherein the triad of actuators are positioned such that the micromirror can be elevated and tilted in any direction;
• and
• wherein an actuator of the plurality of actuators includes:
• a first movable comb fixedly coupled to a first edge of a micromirror within the linear array of movable micromirrors, and
• a second movable comb fixedly coupled to a second edge opposite of the first edge of the micromirror,
• wherein the first movable comb and the second movable comb form a movable portion of an interdigitated actuator.

A programmable micromirror array, comprising:

• an at least one movable micromirror;
• a first movable comb fixedly coupled to a first edge of a movable micromirror within the at least one movable micromirror;
• and
• a second movable comb fixedly coupled to a second edge opposite of the first edge of the movable micromirror;
• wherein the first movable comb and the second movable comb form a movable portion of an interdigitated actuator;
• and
• wherein the movable portion of the interdigitated actuator can apply vertical and rotational motions to the movable micromirror.

A two-dimensional programmable micromirror array, comprising:

• a plurality of movable micromirrors, wherein a micromirror of the plurality of movable micromirrors includes a hexagonal shape;
• a first movable actuator fixedly coupled to a first edge of the micromirror;
• a first folded spring coupled to the distal end of the first movable actuator wherein the first folded spring provides restoring forces to the first movable actuator;
• a second movable actuator fixedly coupled to a second edge of the micromirror;
• a second folded spring coupled to the distal end of the second movable actuator, wherein the second folded spring provides restoring forces to the second movable actuator;
• a third movable actuator fixedly coupled to a third edge of the micromirror;
• and
• a third folded spring coupled to the distal end of the third movable actuator, wherein the third folded spring provides restoring forces to the third movable actuator
• wherein the first movable actuator, the second movable actuator, and the third movable actuator are fixedly coupled to alternating edges of the micromirror, and
• wherein the first movable actuator, the second movable actuator, and the third movable actuator act in concert to apply vertical and two-dimensional rotational motions to the micromirror.

A method for creating a programmable micromirror, comprising:

• receiving a substrate;
• applying an insulating layer on the substrate;
• depositing a plurality of lower actuators on the insulating layer;
• applying a first sacrificial layer over the plurality of lower actuators and exposed portions of the insulating layer;
• depositing a mirror assembly on the first sacrificial layer;
• applying a second sacrificial layer over the mirror assembly and exposed portions of the first sacrificial layer;
• creating a plurality of voids through the first sacrificial layer and the second sacrificial layer, wherein the insulating layer is exposed through the plurality of voids;
• depositing a plurality of upper actuators on exposed portions of the insulating layer;
• and
• removing the first sacrificial layer and the second sacrificial layer.