Apparatus comprising a micro-mechanical optical modulator

An apparatus comprising a micro-mechanical modulator for modulating an optical signal having a wavelength λ, said micro-mechanical modulator comprising:

• a substrate having refractive index ns;
• a multi-layer mirror disposed on said substrate;
• and
• a membrane that is spaced from and movable towards said multi-layer mirror, said membrane having a refractive index nm that is about equal to said refractive index ns, and a thickness tm;
• wherein said multi-layer mirror comprises:
• an anti-reflection layer that is disposed on said substrate;
• and
• a coating layer that is disposed on said anti-reflection layer, said coating layer having a thickness tc;
• and further wherein:
• a sum of said membrane thickness tm and said coating layer thickness tc is about equal to an integer multiple of one-half of said wavelength λ;
• and
• said membrane thickness tm is not equal to an odd integer multiple of one-quarter of said wavelength λ.

An apparatus comprising an optical modulator for modulating an optical signal having a wavelength λ, said optical modulator comprising:

• a non-moving multi-layer mirror comprising a coating layer disposed on an anti-reflection layer, said coating layer having a thickness tc;
• and
• a membrane that is spaced from and movable towards said non-moving multi-layer mirror, said membrane having a thickness tm;
• wherein:
• a sum of said membrane thickness tm and said coating layer thickness tc is about equal to an integer multiple of one-half of said wavelength λ;
• and further wherein:
• said membrane thickness tm is not equal to an odd integer multiple of one-quarter of said wavelength λ.