Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
AssigneeZygo Corporation
InventorsLeslie L. Deck, David Stephenson, Edward J. Gratix, Carl A. Zanoni
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AssigneeZygo Corporation
InventorsLeslie L. Deck, David Stephenson, Edward J. Gratix, Carl A. Zanoni
Estimating the term…
Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferometer are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution in the combined interferogram is diluted.
An interferometric apparatus having an optical axis, said interferometric apparatus comprising:
An interferometric apparatus having an optical axis, said interferometric apparatus comprising:
An interferometric apparatus having an optical axis, said interferometric apparatus comprising:
An interferometric apparatus having an optical axis, said interferometric apparatus comprising:
An interferometric apparatus having an optical axis, said interferometric apparatus comprising:
An interferometric method for use with an interferometer having an optical axis, said interferometric method comprising the steps of:
An interferometric method for use with an interferometer having an optical axis, said interferometric method comprising:
Dependencies are inferred from the claim text.