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US 6,643,013 B1Granted
Glow discharge emission spectroscopic analysis apparatus
AssigneeHoriba, Ltd.
InventorsRyosuke Shimidzu, Thomas Nelis, Susumu Matsumoto
Life of this patent
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Abstract
This invention provides a glow discharge emission spectroscopic analysis apparatus which is capable of making a desired chemical analysis with excellent reproducibility. A glow discharge emission spectroscopic analysis apparatus of this invention is constituted so that the sample is held by a first electrical conductor provided on one side of a glow discharge tube and a second electrical conductor is movable by a cylinder rod to secure the sample in contact with the first electrical conductor. The electrical conductors can be electrically connected with each other when the sample is secured, and a negative electric potential is applied to the electrical conductors.
Claims24
In a glow discharge spectrometer for generating a glow discharge by arranging a sample to face an anode of a glow discharge tube provided in a Faraday cage with inert gas adjacent a surface of the sample under low pressure condition and high frequency voltage or DC voltage applied between the sample and the anode, for analyzing the glow discharge generated, the glow discharge spectrometer improvement comprising:
- a first and second conductor member movably mounted to receive a sample therebetween;
- a force assembly for pressing the sample to seal against the glow discharge tube;
- and
- an electrical connector for providing a common electrical potential to the first and second conductors so that the sample acts as a cathode at a uniform potential.
1 more element
A method of analyzing a semiconductor wafer, comprising the steps of:
- positioning a semiconductor wafer between a first and second conductor member, the first conductor has an aperture to expose a surface of the wafer and the second conductor has a corresponding section to the opposite aperture for exerting a sealing force;
- closing the first and second conductor to secure the semiconductor wafer;
- positioning the exposed surface of the semiconductor wafer to an opening in a glow discharge chamber;
- applying a force to seal the semiconductor wafer to the glow discharge chamber;
- providing a sputtering gas to the glow discharge chamber;
- applying an electrical potential to the semiconductor wafer through the first and second conductors to create a uniform negative potential of sufficient magnitude to cause a plasma of the sputtering gas to erode the semiconductor wafer;
- and
- analyzing the glow discharge emission of light to determine the elements in the semiconductor wafer.
5 more elements
An apparatus for determining the elements in a semiconductor wafer, comprising:
- a first conductor member having a central aperture and of a size larger than the wafer;
- a second conductor member of a size larger than the wafer;
- means for opening and closing the first and second conductor members to mount the wafer therebetween;
- a glow discharge chamber apparatus having an opening adjacent the central aperture of the first conductor member and an anode within the chamber;
- means for exerting a force on the wafer to seal the wafer to the glow discharge chamber apparatus opening when the wafer is mounted between the first and second conductors;
- means for providing a sputtering gas to the glow discharge chamber apparatus;
- means for providing an electrical charge between the first and second conductors to uniformly charge the wafer as a cathode to the anode whereby a glow discharge emission is created as the wafer is sputtered;
- and
- means for providing a spectroscopic analysis of the light from the glow discharge emission to determine the elements in the wafer.
6 more elements
An apparatus for determining the elements in a semiconductor wafer, comprising:
- a conductor member having an aperture, the conductor member has a size to extend across the semiconductor wafer to enable an application of uniform potential to be applied to a surface of the semiconductor wafer to be sampled;
- means for mounting the semiconductor wafer on the conductor member;
- a glow discharge chamber unit having an anode and an opening adjacent the aperture of the conductor member;
- means for exerting a force on the semiconductor wafer including a pair of pressure rod members to seal at least a portion of the surface to be sampled to the glow discharge chamber unit opening when mounted on the conductor member;
- means for providing a sputtering gas to the glow discharge chamber unit;
- means for providing an electrical charge of sufficient power to the conductor member to uniformly charge the surface of the semiconductor wafer as a cathode to the anode, whereby a glow discharge emission is created as the semiconductor wafer is sputtered;
- and
- means for providing spectroscopic analysis of the light from the glow discharge emission to determine the elements in the semiconductor wafer.
5 more elements
A system for determining the elements in a semiconductor sample, comprising:
- a semiconductor wafer;
- a first conductor member, the first conductor member has a size to extend across the semiconductor wafer to enable an application of uniform potential to be applied to a first surface of the semiconductor wafer to be sampled;
- a second conductor member for contacting the opposite side of the semiconductor wafer from the other conductor member;
- means for mounting the semiconductor wafer on the first conductor member;
- a glow discharge chamber unit having an anode and an opening adjacent the first conductor member;
- means exerting a force on the semiconductor wafer to seal at least a portion of the surface to be sampled to the glow discharge chamber unit opening when mounted on the first conductor member;
- means for providing sputtering gas to the glow discharge chamber unit;
- means for providing an electrical charge of sufficient power to the first conductor member to uniformly charge the surface of the semiconductor wafer as a cathode to the anode, whereby a glow discharge emission is created as the semiconductor wafer is sputtered;
- and
- means for providing a spectroscopic analysis of the light from the glow discharge emission to determine the elements in the semiconductor wafer.
7 more elements
An apparatus for determining the elements in a semiconductor wafer, comprising:
- a conductor member having an aperture, the conductor member has a size to extend across the semiconductor wafer to enable an application of uniform potential to be applied to a surface of the semiconductor wafer to be sampled;
- means for mounting the semiconductor wafer on the conductor member;
- a glow discharge chamber unit having an anode and an opening adjacent the aperture of the conductor member;
- means for exerting a force on the semiconductor wafer to seal at least a portion of the surface to be sampled to the glow discharge chamber unit opening when mounted on the conductor member, including a pair of pressure rod members;
- means for providing a sputtering gas to the glow discharge chamber unit;
- means for providing an electrical charge of sufficient power to the conductor member to uniformly charge the surface of the semiconductor wafer as a cathode to the anode, whereby a glow discharge emission is created as the semiconductor wafer is sputtered;
- and
- means for providing a spectroscopic analysis of the light from the glow discharge emission to determine the elements in the semiconductor wafer.
5 more elements
A system for determining the elements in a semiconductor sample, comprising:
- a semiconductor wafer,
- a first conductor member, the first conductor member has a size to extend across the semiconductor wafer to enable an application of uniform potential to be applied to a surface of the semiconductor wafer to be sampled;
- a second conductor member for contacting the opposite side of the semiconductor wafer from the first conductor member;
- means for mounting the semiconductor wafer between the first and second conductor members;
- a glow discharge chamber unit having anode and a opening adjacent the first conductor member;
- means for exerting a force on the semiconductor wafer to seal at least a portion of the surface to be sampled to the glow discharge chamber unit opening when mounted on the first conductor member;
- means for providing a sputtering gas to the glow discharge chamber unit;
- means for providing an electrical charge of sufficient power to the first conductor member to uniformly charge the surface of the semiconductor wafer as a cathode to the anode, whereby a glow discharge emission is created as the semiconductor wafer is sputtered;
- and
- means for providing a spectroscopic analysis of the light from the glow discharge emission to determine the elements in the semiconductor wafer.
7 more elements
A system for determining the elements in a semiconductor sample, comprising:
- a semiconductor wafer
- a conductor member, the conductor member has a size to extend across the semiconductor wafer to enable an application of uniform potential to be applied to an entire surface of the semiconductor wafer to be sampled, the conductor member is larger in size than the semiconductor wafer;
- means for mounting the semiconductor wafer on the conductor member;
- a glow discharge chamber unit having an anode and an opening adjacent the conductor member;
- means for exerting a force on the semiconductor wafer to seal at least a portion the surface to be sampled to the glow discharge chamber unit opening when mounted on the conductor member;
- means for providing sputtering gas to the glow discharge chamber unit;
- means for providing an electrical charge of sufficient power to the conductor member to uniformly charge the surface of the semiconductor wafer as a cathode to the anode, whereby a glow discharge emission is created as the semiconductor wafer is sputtered;
- and
- means for providing a spectroscopic analysis of the light from the glow discharge emission to determine the elements in the semiconductor wafer.
6 more elements
Dependencies are inferred from the claim text.