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AssigneeThe Regents of the University of California
InventorsThomas C. Hale, David S. Moore
Estimating the term…
Apparatus and method for inspecting thin film specimens along a line. A laser emits pulses of light that are split into first, second, third and fourth portions. A delay is introduced into the first portion of pulses and the first portion of pulses is directed onto a thin film specimen along a line. The third portion of pulses is directed onto the thin film specimen along the line. A delay is introduced into the fourth portion of pulses and the delayed fourth portion of pulses are directed to a photorefractive crystal. Pulses of light reflected from the thin film specimen are directed to the photorefractive crystal. Light from the photorefractive crystal is collected and transmitted to a linear photodiode array allowing inspection of the thin film specimens along a line.
A line sensing device for laser acoustic inspection of thin film specimens comprising:
A method of sensing a line along a thin film specimen comprising the steps of:
Dependencies are inferred from the claim text.