Probe station thermal chuck with shielding for capacitive current
AssigneeCascade Microtech, Inc.
InventorsClarence E. Cowan, Paul A. Tervo, John L. Dunklee
Life of this patent
Estimating the term…
Abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
Claims21
A thermal driver for modifying a temperature of a chuck, said thermal driver comprising:
- (a) a thermoelectric heat pump including an electrical conductor, said thermoelectric heat pump modifying a temperature in response to a direct current in said electrical conductor;
- and
- (b) a first conductive member capacitively coupled to said electrical conductor while being free from direct electrical connection to said thermoelectric heat pump, said first conductive member being arranged to intercept a current emanating from said thermoelectric heat pump.
A thermal driver for modifying the temperature of a chuck, said thermal driver comprising:
- (a) a thermal device including an electrical conductor, said thermal device responsive to electrical energy to modify a temperature;
- (b) a first conductive member substantially enclosing said thermal device;
- and
- (c) a conductive connection of said first conductive member to a thermal driver controller regulating a flow of electrical energy to said thermal device.
The thermal driver of 13 further comprising a second conductive member substantially enclosing said first conductive member but free of electrical connection to said first conductive member, said second conductive member being connected to a ground.
Dependencies are inferred from the claim text.