Probe card for tester head
AssigneeSamsung Electronics Co., Ltd.
InventorsKi-sang Kang, Sung-mo Kang
Life of this patent
Estimating the term…
Abstract
A semiconductor integrated circuit wafer tester includes a supporting plate on which a semiconductor wafer may be positioned and a tester head having a circular top plate installed a predetermined distance away from the supporting plate, wherein a probe card in the tester head that includes a circular printed circuit board having a diameter of at least 400 mm (15.75 inches) that is connected to the top plate and having a plurality of probe units formed on the printed circuit board allows electrical parameters of multiple chips formed on the semiconductor wafer to be measured simultaneously.
Claims18
A probe card for a tester head in a testing apparatus including a supporting plate on which a semiconductor wafer may be positioned and the tester head installed a predetermined distance away from the supporting plate and having a top plate, and which tests the electrical parameters of one or more chips formed on the semiconductor wafer, the probe card comprising:
- a printed circuit board connected to the top plate, wherein the printed circuit board is a circular plate having a central point at the center thereof, a diameter of no less than 400 mm (15.75 inches), and is partitioned into four quadrants;
- a plurality of connecting elements each having a plurality of contact pins formed on the printed circuit board such that generally one fourth of the plurality of connecting elements are allotted to each one of the four quadrants, and such that the center of each of the plurality of connecting elements is 191.5 mm (7.54 inches) away from the central point of the printed circuit board, wherein two adjacent connecting elements belonging to the same quadrant of the printed circuit board among the plurality of connecting elements form an angle of 3.5 degrees with each other;
- and
- a probe unit connected to the printed circuit board.
Dependencies are inferred from the claim text.