MoNx resistor for superconductor integrated circuit
AssigneeNorthrop Grumman Corporation
InventorRoger Hu
Life of this patent
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Abstract
A superconductor integrated circuit (10) includes a silicon substrate (12) a niobium ground layer (14), an anodized niobium first ground insulator layer (16), a second ground insulator layer (22), a molybdenum nitrogen (MoNx) resistor (18) provided between the first and second ground insulator layers (16, 22), a Josephson junction (23) provided above the first and second ground insulator layers (16, 22), first and second oxide insulators (27, 30), and a niobium interconnect (28) for providing electrical communication with the Josephson junction. The MoNx first resistor (18) provides a sheet resistance of between 3-5 ohms/sq at 4° K with a thickness of approximately 95 nm and enables the superconductor integrated circuit (10) to have a critical current density between 6-8 kA/cm2.
Claims8
A resistor for a Josephson junction comprising:
- an MoNx film deposited in proximity to the Josephson junction, the MoNx film having a thickness of approximately 70 nm to 150 nm and a sheet resistance of approximately 3-5 ohms/square at a temperature of 4° Kelvin,
- wherein a value of x with respect to the MoNx film is between 0 and 1.
A superconductor integrated circuit comprising:
- a silicon substrate;
- a niobium ground layer formed on the silicon substrate;
- a first ground insulator layer comprised of anodized niobium and provided above the niobium ground layer;
- a second ground insulator layer comprised of an oxide and provided above the first ground insulator;
- a resistor comprising an MoNx film and provided between the first and second ground insulator layers;
- a Josephson junction provided above the first and second ground insulator layers;
- a first oxide insulator and a second oxide insulator provided above the resistor;
- and
- a niobium interconnect provided above the Josephson junction for providing electrical communication therewith,
- wherein a value of x with respect to the MoNx is between 0 and 1.
Dependencies are inferred from the claim text.