Microelectromechanical switch
AssigneeTexas Instruments Incorporated
InventorsTsen-Hwang Lin, Yu-Pei Chen, Darius L. Crenshaw
Life of this patent
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Abstract
A microelectromechanical switch includes a substrate, an insulator layer disposed outwardly from the substrate, and an electrode disposed outwardly from the insulator layer. The switch also includes a dielectric layer disposed outwardly from the insulator layer and the electrode, the dielectric layer having a dielectric constant of greater than or equal to twenty. The switch also includes a membrane layer disposed outwardly from the dielectric layer, the membrane layer overlying a support layer, the support layer operable to space the membrane layer outwardly from the dielectric layer.
Claims10
A microelectromechanical switch comprising:
- a substrate;
- an insulator layer disposed outwardly from the substrate;
- an electrode having an outward surface and opposing sidewalls, said electrode disposed outwardly from the insulator layer which is one of an input or an output;
- a dielectric layer covering said outward surface and said opposing sidewalls of said electrode and disposed outwardly from the insulator layer and the electrode, the dielectric layer having a dielectric constant of at least twenty;
- and
- an electrically conductive flexible membrane layer disposed outwardly from the dielectric layer and movable between said dielectric layer and a locus outwardly spaced from said dielectric layer which is one of an input or an output;
- said electrically conductive flexible layer comprising a sheet of electrically conductive material having a plurality of vias extending therethrough;
- said dielectric layer electrically isolating said electrically conductive flexible membrane from said electrode.
Dependencies are inferred from the claim text.