Asymmetric inside spacer for vertical transistor

A method of forming a DRAM cell comprising the steps of:

• a) forming a trench capacitor embedded in a semiconductor substrate by etching a trench in said substrate;
• forming a capacitor dielectric on an interior surface of said trench;
• forming a center electrode within a lower portion of said trench;
• b) forming a vertical transistor disposed above said center electrode and connected thereto by a lower transistor electrode, said vertical transistor having a gate formed from a conductive gate material and disposed within said trench above said center electrode and separated from said substrate by a gate insulation layer on a first side thereof and having an upper electrode disposed outside said trench and having an interconnect member contact area;
• c) depositing a mask layer above said substrate and patterning said mask layer to form a gate connection member from a portion of said conductive gate material on a first side thereof, thereby etching an aperture into said layer of conductive gate material on a second side of said gate opposite said first side and outside said gate connection member;
• d) filling said aperture with a dielectric to form a dielectric plug in said aperture and planarizing said dielectric outside said aperture;
• and
• e) depositing a conductive stack layer and patterning said conductive stack layer to form a gate control member in electrical contact with said gate connection member and displaced from said interconnect member contact area on said first side and from said dielectric plug on said second side, whereby said gate conductive material is protected by said gate control member and by said dielectric plug while patterning said conductive stack layer.

A method of forming an integrated circuit containing an array of DRAM cells and support transistors comprising the steps of:

• a) forming an array of trench capacitors embedded in a semiconductor substrate by etching an array of trenches in said substrate, forming capacitor dielectrics on an interior surface of said trenches, and forming center electrodes within a lower portion of said trenches;
• b) forming a vertical transistor disposed above said center electrode and connected thereto by a lower transistor electrode, said vertical transistor having a gate formed from a conductive gate material and disposed within said trench and separated from said substrate by a gate insulation layer on a first side thereof, disposed above said center electrode and having an upper electrode disposed outside said trench and having an interconnect member contact area;
• c) forming a layer of gate oxide on a surface of said substrate and depositing a layer of polysilicon on said gate oxide;
• d) depositing a mask layer above said substrate and patterning said mask layer to form a set of gate connection members from a portion of said gate conductive material on a first side thereof, thereby etching an aperture into said layer of conductive gate material on a second side of said gates opposite said first side and outside said portion of said gate conductive material;
• e) filling said apertures with a dielectric to form dielectric plugs in said aperture and planarizing said dielectric outside said aperture;
• f) depositing a conductive stack layer and patterning said conductive stack layer to form simultaneously a set of support transistor gates outside said array and a set of gate control members in electrical contact with said gate connection members and displaced from said interconnect member contact areas on said first side and from said dielectric plugs on said second side, whereby said gate conductive material is protected by said gate control members and by said dielectric plugs while patterning said conductive stack layer;
• g) forming a set of insulating sidewalls on said set of gate control members;
• and
• h) forming a set of interconnect members in electrical contact with said set of interconnect member contact areas.