Methods for the automated testing of reticle feature geometries
AssigneeKoninklijke Philips Electronics N.V.
InventorsSudhir G. Subramanya, Clifford Takemoto, Satyendra S. Sethi
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Abstract
A method for inspecting features on a reticle is provided. The method includes providing a layout design of a test feature and transferring the layout design of the test feature onto the reticle. After the test feature is transferred onto the reticle, an image of the transferred layout design is captured to determine whether or not the transfer is acceptable. This determination is made by comparing the captured image of the transferred layout design against the layout design of the test feature. The comparison ascertains deviations between the captured image and the layout design and determines if the deviations fall within a user specified range.
Claims31
A method for inspecting features on a reticle, comprising:
- providing a layout design of a test feature;
- transferring the layout design of the test feature onto the reticle;
- capturing an image of the transferred layout design;
- and
- comparing the captured image of the transferred layout design against the layout design of the test feature to ascertain deviations between -the captured image and the layout design;
- wherein the ascertaining deviations between the captured image and the layout design includes determining a diagonal difference.
A method of ascertaining a degree of distortion of features of a reticle, comprising:
- providing a test feature;
- transferring the test feature to a reticle to create a transferred test feature;
- comparing the transferred test feature with the test feature to ascertain the degree of distortion and whether modifications of the test feature are necessary to compensate for the degree of distortion of the transferred test feature;
- wherein ascertaining the degree of distortion includes determining a diagonal difference.
A computer readable media having program instruction for carrying out a method of ascertaining a degree of distortion of features of a reticle, comprising:
- programming instructions for providing test features;
- programming instructions for capturing a transferred test feature that is a result of a transfer of the test feature to a reticle;
- and
- programming instructions for comparing the transferred test feature with the test feature to ascertain the degree of distortion and whether modifications of the test feature are necessary to compensate for the degree of distortion of the transferred test feature;
- wherein ascertaining the degree of distortion includes determining a diagonal difference.
Dependencies are inferred from the claim text.