β-diketonatocopper(I) complex containing allene compounds as ligand and process for producing the same
AssigneeNissan Chemical Industries, Ltd.
InventorsHisayuki Watanabe, Hideki Musashi, Yasuo Kawamura
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Abstract
A β-diketonatocopper(I) complex which contains as a ligand (L) an allene compound and is represented by formula (2) wherein, R6 and R7 may be the same or different and each represents linear or branched C1-4 alkyl, C1-4 alkoxy, or linear or branched C1-4 fluoroalkyl, R8 represents hydrogen or fluorine, and L represents the allene compound, and a process for producing the same. The complex is useful in forming a thin copper film by metal-organic vapor deposition (hereinafter abbreviated as MOCVD) method.
Claims2
A β-diketonatocopper(I) complex which contains as a ligand (L) an allene compound of formula (1)
- wherein R1, R2, R3 and R4 may be the same or different and each represents hydrogen, C1-4 alkyl or (R5)3Si—, or R1 and R2, together with the carbon atom bonding them, may form 3- to 6-member ring, or R2 and R3, together with the allene bond group bonding them, may form 8- to 10-member ring, R5s may be the same or different and independently of one another represent linear or branched C1-4 alkyl, and which is represented by formula (2)
- wherein, R6 and R7 may be the same or different and each represents linear or branched C1-4 alkyl, C1-4 alkoxy, or linear or branched C1-4 fluoroalkyl, R8 represents hydrogen or fluorine, and L represents the allene compound of formula (1).
A process for producing a β-diketonatocopper(I) complex represented by formula (2)
- wherein, R6 and R7 may be the same or different and each represents linear or branched C1-4 alkyl, C1-4 alkoxy, or linear or branched C1-4 fluoroalkyl, R8 represents hydrogen or fluorine, and L represents the allene compound of formula (1), characterized in that the process comprises reacting an allene compound of formula (1)
- wherein R1, R2, R3 and R4 may be the same or different and each represents hydrogen, C1-4 alkyl or (R5)3Si—, or R1 and R2, together with the carbon atom bonding them, may form 3- to 6-member ring, or R2 and R3, together with the allene bond group bonding them, may form 8- to 10-member ring, R5s may be the same or different and independently of one another represent linear or branched C1-4 alkyl, with an enol compound of formula (3)
- wherein R9 and R10 may be the same or different and each represents linear or branched C1-4 alkyl, C1-4 alkoxy, or linear or branched C1-4 fluoroalkyl, R11 represents hydrogen or fluorine in the presence of a copper(I) compound.
Dependencies are inferred from the claim text.