Method of manufacturing material for forming insulating film
AssigneeJsr Corporation
InventorsHidenori Suzuki, Katsuyuki Kakinoki, Yoshihisa Nakase, Michinori Nishikawa, Takashi Okada, Kinji Yamada
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Abstract
A method of manufacturing an insulating film-forming material comprising a curable composition comprisING (A) an inorganic polymer compound or an organic polymer compound and (B) an organic solvent, which comprises treating the curable composition with a zeta potential-producing filter material. Because the curable composition has a very small content of alkali metals and heavy metals, the composition is suitably used for the manufacture of materials for forming insulating films which have a wide variety of applications in the electronic field.
Claims12
A method of manufacturing an insulating film-forming material comprising:
- treating a curable composition which comprises (A) a polymer selected from the group consisting of a hydrolysis condensate of at least one compound selected from the group consisting of compounds (A-1) and (A-2) which are respectively the following formulas (1) or (2):
- R1aSi(OR2)4−a (1)
- wherein R is a hydrogen atom, a fluorine atom, or a monovalent organic group, R2 is a monovalent organic group, and a is an integer from 0 to 2,
- R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c (2)
- wherein R3, R4, R5, and R6 individually are a monovalent organic group, b and c individually are an integer from 0 to 2, R7 is an oxygen atom or a group —(CH2)n—, wherein n is an integer from 1 to 6, and d is 0 or 1, aromatic polyarylenes and aromatic polyarylene ethers
- and (B) an organic solvent or mixtures of organic solvents with a zeta potential-producing filter material.
The method of manufacturing an insulating film-forming material comprising a curable composition which comprises (A) a polymer selected from the group consisting of a hydrolysis condensate of at least one compound selected from the group consisting of compounds (A-1) and (A-2) which are respectively the following formulas (1) or (2):
- R1aSi(OR2)4−a (1)
- wherein R is a hydrogen atom, a fluorine atom, or a monovalent organic group, R2 is a monovalent organic group, and a is an integer from 0 to 2,
- R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c (2)
- wherein R3, R4, R5, and R6 individually are a monovalent organic group, b and c individually are an integer from 0 to 2, R7 is an oxygen atom or a group —(CH2)n—, wherein n is an integer from 1 to 6, and d is 0 or 1, aromatic polyarylenes and aromatic polyarylene ethers
- and (B) an organic solvent or mixtures of organic solvents comprising:
- providing (B) said polymer,
- treating said polymer with a zeta potential-producing filter material, and
- producing said curable composition from (A) the resulting polymer and (B) said organic solvent or said mixtures of said inorganic solvents.
A method of manufacturing an insulating film-forming material comprising a curable composition which comprises (A) a polymer selected from the group consisting of a hydrolysis condensate of at least one compound selected from the group consisting of compounds (A-1) and (A-2) which are respectively the following formulas (1) or (2):
- R1aSi(OR2)4−a (1)
- wherein R is a hydrogen atom, a fluorine atom, or a monovalent organic group, R2 is a monovalent organic group, and a is an integer from 0 to 2,
- R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c (2)
- wherein R3, R4, R5, and R6 individually are a monovalent organic group, b and c individually are an integer from 0 to 2, R7 is an oxygen atom or a group —(CH2)n —, wherein n is an integer from 1 to 6, and d is 0 or 1, aromatic polyarylenes and aromatic polyarylene ethers
- and (B) an organic solvent or mixtures of organic solvents comprising:
- providing (A) said polymer,
- treating said polymer with a zeta potential-producing filter material,
- producing (A) said polymer from raw materials, and
- producing said curable composition from (A) the resulting polymer and (B) said organic solvent or said mixtures of said inorganic solvents.
The method of manufacturing an insulating film-forming material comprising a curable composition which comprises (A) a polymer selected from the group consisting of organic polymers, excluding homopolymers and copolymers of vinyl phenol, and inorganic polymers, a hydrolysis condensate of at least one compound selected from the group consisting of compounds (A-1) and (A-2) which are respectively the following formulas (1) or (2):
- R1aSi(OR2)4−a (1)
- wherein R is a hydrogen atom, a fluorine atom, or a monovalent organic group, R2 is a monovalent organic group, and a is an integer from 0 to 2,
- R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c (2)
- wherein R3, R4, R5, and R6 individually are a monovalent organic group, b and c individually are an integer from 0 to 2, R7 is an oxygen atom or a group —(CH2)n—, wherein n is an integer from 1 to 6, and d is 0 or 1, aromatic polyarylenes and aromatic polyarylene ethers
- and (B) an organic solvent or mixtures of organic solvents comprising:
- providing (B) said organic solvent or said mixtures of said organic solvents,
- treating said organic solvent or said mixtures of said organic solvents with a zeta potential-producing filter material, and
- producing said curable composition form (B) said organic solvent or said mixtures of said organic solvents and (A) said polymer.
Dependencies are inferred from the claim text.