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AssigneeDaikin Industries, Ltd.
InventorsSeiji Kawaguchi, Tsuyoshi Noguchi, Takafumi Yamato, Mitsuru Kishine
Estimating the term…
To provide the filler which is added to a composition for a sealing member, etc. for sealing of semi-conductor production equipment being apt to be damaged greatly by mixing of a foreign matter and is small in a change in weight in either of the oxygen plasma irradiation and CF4 plasma irradiation, and the crosslinkable elastomer composition. The filler is used for the crosslinkable elastomer and has an imide structure, and a change in weight of the filler is not more than 4 mg/cm2·hr in either of the oxygen plasma irradiation and CF4 plasma irradiation. The crosslinkable elastomer composition comprises the filler and the crosslinkable elastomer such as a fluorine-containing elastomer.
A filler for crosslinkable elastomer, in which a change in weight of the filler after either of oxygen plasma irradiation and CF4 plasma irradiation under the conditions of a flow rate of 200 sccm, a pressure of 280 mTorr, a RF output of 400 W and an irradiation time of 54 minutes is not more than 4 mg/cm2·hr.
Dependencies are inferred from the claim text.