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US 6,642,158 B1Granted
Photo-thermal induced diffusion
AssigneeIntel Corporation
InventorsGary A. Brist, Gary B. Long, Daryl A. Sato
Life of this patent
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Abstract
Formation of a mixed-material composition through diffusion using photo-thermal energy. The diffusion may be used to create electrically conductive traces. The diffusion may take place between material layers on one of a package substrate, semiconductor substrate, substrate for a printed circuit board (PCB), or other multi-layered substrate. The photo-thermal energy may be supplied by various devices, for example a YAG laser device, CO2 laser device, or other energy source.
Claims10
A method, comprising:
- applying photo-thermal energy to a layer of first material disposed on a layer of second material which includes metal, wherein said thermal energy penetrates at least into the first layer to diffuse a portion of the first material into the second material to form an electrically conductive trace;
- removing non-diffused portions of the first layer;
- and
- removing non-diffused portions of the second layer.
1 more element
A method comprising:
- forming a metal layer on a core;
- placing a diffusion layer on the metal layer wherein the diffusion layer includes a conversion coating material to protect the metal layer from oxidation;
- and
- applying photo-thermal energy to the diffusion layer to diffuse a portion of the diffusion layer into the metal layer.
1 more element
Dependencies are inferred from the claim text.