Dual laser anneal for graded halo profile

A method of manufacturing a semiconductor device, the method comprising:

• forming a gate electrode over an upper surface of a substrate with a gate insulating layer therebetween;
• forming deep source/drain regions in the substrate on opposite sides of the gate electrode;
• ion implanting to form deep amorphized regions on each side of the gate electrode extending into the substrate to a first depth;
• ion implanting an impurity into the deep amorphized regions to form deep halo implants;
• laser thermal annealing to recrystallize the first deep amorphized regions and to activate the deep halo implants to form deep halo regions;
• ion implanting to form shallow amorphized regions extending into the substrate to a second depth, less than the first depth, within the deep halo regions;
• ion implanting an impurity into the shallow amorphized regions to form shallow halo implants;
• and
• laser thermal annealing to recrystallize the shallow amorphized regions and to activate the shallow halo implants to form shallow halo regions.