Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation
AssigneeNGK Insulators, Ltd.
InventorsHirotake Yamada, Tsuneaki Ohashi
Life of this patent
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Abstract
The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixture of powdery yttria and alumina materials is sprayed on a substrate to form a sprayed yttria-alumina complex oxide film. Preferably, the powdery yttria material has a 50 percent mean particle diameter in a range of 0.1 μm to 100 μm, and the powdery alumina material has a 50 percent mean particle diameter in a range of 0.1 μm to 100 μm. Preferably, the yttria-alumina complex oxide contains at least garnet phase, and may further contain perovskite phase.
Claims13
A film of an yttria-alumina complex oxide formed on a substrate, wherein said yttria-alumina complex oxide comprises garnet and perovskite phases, and a ratio YAL(420)/YAG(420) is in a range of 0.05 to 1.5, wherein said ratio YAL(420)/YAG(420) is the ratio of a peak strength YAL (420) of the (420) plane of said perovskite phase to a peak strength YAG (420) of the (420) plane of said garnet phase, said peak strengths being measured by X-ray diffraction.
A film of an yttria-alumina complex oxide formed on a substrate, wherein said vttria-alumina complex oxide comprises garnet and perovskite phases, and a ratio YAL(420)/YAG(420) is in a range of 0.05 to 1.5, wherein said ratio YAL(420)/YAG(420) is the ratio of a peak strength YAL (420) of the (420) plane of said perovskite phase to a peak strength YAG (420) of the (420) plane of said garnet phase, said peak strengths being measured by X-ray diffraction;
- wherein said film is free from cracks having a length of 3 μm or more and a width of 0.1 μm or more.
A film formed on a substrate by spraying, said film being made of an yttria-alumina complex oxide and being free from cracks having a length of 3 μm or more and a width of 0.1 μm or more.
A film formed on a substrate by spraying, said film being made of an yttria-alumina complex oxide and being free from cracks having a length of 3 μm or more and a width of 0.1 μm or more;
- wherein said yttria-alumina complex oxide comprises garnet and perovskite phases, and a ratio YAL(420)/YAG(420) is in a range of 0.05 to 1.5, wherein said ratio YAL(420)/YAG(420) is the ratio of a peak strength YAL (420) of the (420) plane of said perovskite phase to a peak strength YAG (420) of the (420) plane of said garnet phase, said peak strengths being measured by X-ray diffraction.
A corrosion-resistant member comprising a substrate and a film of an yttria-alumina complex oxide, wherein said yttria-alumina complex oxide comprises garnet and perovskite phases, and a ratio YAL(420)/YAG(420) is in a range of 0.05 to 1.5, wherein said ratio YAL(420)/YAG(420) is the ratio of a peak strength YAL (420) of the (420) plane of said perovskite phase to a peak strength YAG (420) of the (420) plane of said garnet phase, said peak strengths being measured by X-ray diffraction.
A corrosion-resistant member comprising a substrate and a film formed by spraying, wherein said film comprises an yttria-alumina complex oxide being free from cracks having a length of 3 μm or more and a width of 0.1 μm or more.
Dependencies are inferred from the claim text.