Transition metal oxide doped alumina and methods of making and using
AssigneeThe Morgan Crucible Company plc
InventorsCheng-Tsin Lee, Randel F. Mercer
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Abstract
The invention relates to the utilization of doped alumina for static charge sensitive applications, and to methods for making and using the same, e.g., for varying the electrical conductivity of alumina by doping with an appropriate transition metal oxide and subsequently heating to high temperatures in a reducing environment. This treatment allows the electrical conductivity to be tailored and thus provides a cost effective means for producing components with controlled resistivity.
Claims21
An electrostatic charge dissipative ceramic material comprising alumina doped with a transition metal oxide and containing one or more alkaline earth metal oxides in an amount less than about 1 wt %, calculated as oxide based on the total weight of the ceramic material.
An electrostatic charge dissipative ceramic material comprising alumina doped with a transition metal oxide and containing one or more alkaline earth metal oxides in an amount less than about 1 wt %, wherein the transition metal oxide is present in an amount ranging from about 2 to about 8 wt %, calculated as oxide based on the total weight of the ceramic material.
An apparatus comprising at least one component formed from or coated with an electrostatic charge dissipative ceramic material comprising alumina doped with a transition metal oxide and containing one or more alkaline earth metal oxides in an amount less than about 1 wt %, calculated as oxide based on the total weight of ceramic material.
An apparatus comprising:
- at least one component formed from or coated with an electrostatic charge dissipative ceramic material comprising alumina doped with a transition metal oxide and containing one or more alkaline earth metal oxides in an amount less than about 1 wt %, calculated as oxide based on the total weight of ceramic material;
- and
- an electrical connection between said component and an object at a lower electrical potential.
An apparatus selected from the group consisting of a robotic end effector, a wafer cassette, a wafer chuck, a vacuum wand, a tweezer contact pad, and a storage rack, comprising at least one component formed from or coated with an electrostatic charge dissipative material comprising alumina doped with a transition metal oxide, and one or more alkaline earth metal oxides present in total amount less than about 1 wt %, calculated as oxide based on the total weight of the ceramic material.
An apparatus selected from the group consisting of a robotic end effector, a wafer cassette, a wafer chuck, a vacuum wand, a tweezer contact pad, and a storage rack, comprising at least one component formed from or coated with an electrostatic charge dissipative material comprising alumina doped with a transition metal oxide, and silica present in an amount less than about 1 wt %, calculated based on the total weight of the ceramic material.
An electrostatic charge dissipative ceramic material comprising alumina doped with a transition metal oxide, and silica present in total amount less than about 1 wt %, calculated based on the total weight of the ceramic material.
Dependencies are inferred from the claim text.