Method of forming thin film of inorganic solid electrolyte
AssigneeSumitomo Electric Industries, Ltd.
InventorsHirokazu Kugai, Nobuhiro Ota
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Abstract
A method of producing a thin film of an inorganic solid electrolyte having a relatively high ionic conductance is provided. In the method, a thin film made of an inorganic solid electrolyte is formed, by a vapor deposition method, on a base member being heated. The thin film obtained through the heat treatment exhibits an ionic conductance higher than that of the thin film formed on the base member not being heated. The ionic conductance can also be increased through the steps of forming the thin film made of the inorganic solid electrolyte on the base member at room temperature or a temperature lower than 40° C. and then heating the thin film of the inorganic solid electrolyte.
Claims22
A method of producing a product including a thin film of an inorganic solid electrolyte, comprising the steps:
- a) providing a base member;
- b) heating the base member to a heating temperature;
- and
- c) while heating the base member to the heating temperature, forming a thin film of an inorganic solid electrolyte on the base member by a vapor deposition process, wherein the inorganic solid electrolyte is a sulfide that contains sulfur, 20 to 65 atomic percent of lithium, and at least one element selected from the group consisting of phosphorous, silicon, boron, germanium and gallium;
- wherein the heating temperature is at least 40° C. and lower than a glass transition temperature of the thin film of the inorganic solid electrolyte;
- and
- wherein carrying out at least the steps a), b) and c) produces the product including the thin film of the inorganic solid electrolyte on the base member, in which the thin film is amorphous or glassy and has an ionic conductance higher than would have resulted without the heating of the base member to the heating temperature.
A method of producing a product including a thin film of an inorganic solid electrolyte, comprising the steps:
- a) providing a base member;
- b) forming a thin film of an inorganic solid electrolyte on the base member at a temperature lower than 40° C., wherein the inorganic solid electrolyte is a sulfide that contains sulfur, 20 to 65 atomic percent of lithium, and at least one element selected from the group consisting of phosphorous, silicon, boron, germanium and gallium;
- and
- c) after the step b), heating the thin film to a heat treating temperature so as to increase an ionic conductance of the thin film, wherein the heat treating temperature is at least 40° C. and lower than a glass transition temperature of the thin film of the inorganic solid electrolyte;
- and
- wherein carrying out at least the steps a), b) and c) produces the product including the thin film of the inorganic solid electrolyte on the base member, in which the thin film is amorphous or glassy.
Dependencies are inferred from the claim text.