US 6,641,709 B2 · Mist trap mechanism and method for plating apparatus

Abstract

A mist trap mechanism and method for a plating apparatus, which can provide an improved mist removing effect by a simple structure, are provided. A gas discharge passage is formed to connect the space in a plating chamber and space outside of the plating chamber and provided with a liquid spouting portion and a solid wall. The discharge gas collides with the liquid spouted from the liquid spouting portion, and the discharge gas collides with the solid wall which has its surface wetted with the liquid spouted from the liquid spouting portion. Such a two-staged collision of the discharge gas effectively takes the mist contained in the discharge gas into the liquid. A liquid recovery portion is disposed in connection with the gas discharge passage to collectively catch the mist in a state captured by the liquid.

Claims6

Dependent claims

A mist trap mechanism for a plating apparatus, comprising:

a gas discharge passage which runs from a space in a plating chamber to a space outside the plating chamber;
a liquid spouting portion which is disposed in the gas discharge passage and spouts a liquid to be collided with a stream of gas being discharged;
a solid wall which is disposed in the gas discharge passage in such a way that its surface gets wet with the spouted liquid and the wet surface collides with the stream of discharge gas;
and
a liquid recovery portion which is disposed in connection with the gas discharge passage and recovers the spouted liquid, the liquid collided with the stream of gas and the liquid having wetted the surface of the solid wall.

2 more elements

Dependencies are inferred from the claim text.

Mist trap mechanism and method for plating apparatus

Life of this patent

Mist trap mechanism and method for plating apparatus

Life of this patent

Abstract

Claims6