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US 6,641,635 B1Granted
Liquid based air filtration system
AssigneeLSI Logic Corporation
InventorNewell E. Chiesl
Life of this patent
Estimating the term…
Abstract
An air filtration system uses a liquid to remove impurities from the air. A specialized chamber allows the air and liquid to contact each other in close proximity, so that the liquid can pick up not only particulate matter, but fumes and toxic gasses as well. The air can be bubbled through the liquid, or the liquid can be introduced into the chamber as a gentle rain, a spray, a vapor, a waterfall, or any other configuration that allows active contact between the two mediums. The liquid can then be cleaned of contaminants, e.g., by centrifugal force, while the liquid is then reused.
Claims4
A clean room area comprising:
- first air ports that allow air to enter the clean room near a ceiling thereof;
- second air ports that collect air as it leave said clean room;
- and
- air handling equipment that processes the air prior to returning the air to the clean room, wherein said air handling equipment is operatively connected to said first air ports and said second air ports, wherein said air handling equipment comprises:
- an air/liquid chamber, wherein the air in said air/liquid chamber contacts a liquid, which removes contaminants in the air;
- and
- a liquid/dust separator system, connected to said air/liquid chamber, which collects said liquid, removes contaminants from said liquid, and returns said liquid to said air/liquid chamber.
4 more elements
Dependencies are inferred from the claim text.