Miniature ultrasound transducer
AssigneeThe Cleveland Clinic Foundation
InventorsAaron J. Fleischman, Shuvo Roy, Geoffrey R. Lockwood
Life of this patent
Estimating the term…
Abstract
An ultrasonic transducer (108) for use in medical imaging comprises a substrate (300) having first and second surfaces. The substrate (300) includes an aperture (301) extending from the first surface to the second surface. Electronic circuitry (302) is located on the first surface. A diaphragm (304) is positioned at least partially within the aperture (301) and in electrical communication with the electronic circuitry (302). The diaphragm (304) has an arcuate shape, formed by applying a differential pressure, that is a section of a sphere. A binder material (314) is in physical communication with the diaphragm (304) and the substrate (300).
Claims33
An ultrasonic transducer for use in medical imaging, said ultrasonic transducer comprising:
- a substrate having oppositely disposed first and second outer surfaces, said substrate including an aperture extending from said first outer surface to said second outer surface;
- a diaphragm positioned at least partially within said aperture, said diaphragm having an arcuate shape that is a section of a sphere for focusing ultrasonic waves emitted from the diaphragm;
- a plurality of electrodes in physical communication with said diaphragm;
- and
- a binder material in physical communication with said diaphragm and said substrate.
A method for forming an ultrasonic transducer comprising the steps of:
- providing a silicon substrate, having oppositely disposed first and second outer surfaces;
- creating an aperture in the substrate extending from the first surface to the second surface via a micromachining, microfabrication, or MEMS fabrication process;
- covering the aperture with a film;
- forming a plurality of electrodes in physical communication with the film via a micromachining, microfabrication, or MEMS fabrication process;
- applying a differential pressure across the film to form a diaphragm having a shape that is a section of a sphere;
- and
- applying binding material to the diaphragm to maintain the spherical section shape of the diaphragm.
The method of step 21 where the step of rendering the diaphragm piezoelectric comprises corona discharge polling of the diaphragm.
A medical device for insertion into a mammalian body, said medical device comprising:
- an insertable body portion;
- and
- an ultrasonic transducing section on said insertable body portion, said ultrasonic transducing section having at least one ultrasonic transducer, each of said at least one ultrasonic transducer comprising:
- a substrate having oppositely disposed first and second outer surfaces, said substrate including an aperture extending from said first outer surface to said second outer surface;
- a diaphragm positioned at least partially within said aperture, said diaphragm having an arcuate shape that is a section of a sphere for focusing ultrasonic waves emitted from said diaphragm;
- a plurality of electrodes in physical communication with said diaphragm;
- and
- a binder material in physical communication with said diaphragm and said substrate.
Dependencies are inferred from the claim text.