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US 6,641,470 B1Granted
Apparatus for accurate endpoint detection in supported polishing pads
AssigneeLam Research Corporation
InventorsEugene Y. Zhao, Kang Jia, Michael David Steiman, Herbert Elliot Litvak, Christian David Frederickson
Life of this patent
Estimating the term…
Abstract
An optical window structure is disclosed. The optical window structure includes a support layer that has a reinforcement layer and a cushioning layer. In addition, the optical windows structure has a polishing pad which is attached to a top surface of the support layer. Furthermore, the optical window structure has an optical window opening and a shaped optical window. The shaped optical window at least partially protrudes into the optical window opening in the support layer and the polishing pad during operation.
Claims37
An optical window structure, comprising:
- a support layer, the layer including a reinforcement layer and a cushioning layer, the cushioning layer being disposed above the reinforcement layer;
- a polishing pad, the polishing pad being attached to a top surface of the support layer;
- an optical window opening;
- and
- a shaped optical window, the shaped optical window being configured to at least partially protrude into the optical window opening in the support layer and the polishing pad during operation, and the shaped optical window being separated from a side wall of the polishing pad.
2 more elements
An optical window structure, comprising:
- a support layer, the support layer including a reinforcement layer and a cushioning layer, the cushioning layer being disposed above the reinforcement layer;
- a polishing pad, the polishing pad being attached to a top surface of the support layer;
- and
- a flexible optical window, the flexible optical window being configured to at least partially protrude into an optical window opening in the support layer and the polishing pad when air pressure is applied to a bottom surface of the flexible optical window, and the flexible optical window, when partially protruded, being separated from a side wall of the polishing pad.
1 more element
An optical window structure, comprising:
- a support layer, the support layer including a reinforcement layer and a cushioning layer, the reinforcement layer being stainless steel and the cushioning layer being polyurethane;
- a polishing pad, the polishing pad being attached to a top surface of the support layer, and the polishing pad being a polymeric material;
- and
- a shaped optical window, the shaped optical window being configured to at least partially protrude into an oval optical window opening in the polishing pad, and a top surface of the shaped optical window being configured to be recessed between about 0.010 inch to about 0.030 inch below a top surface of the polishing pad, and the shaped optical window being one of a transparent material and a semi-transparent material, and the shaped optical window being separated from a side wall of the polishing pad.
1 more element
An optical window structure, comprising:
- a support layer, the layer including a reinforcement layer and a cushioning layer;
- a polishing pad, the polishing pad being attached to a top surface of the support layer;
- an optical window opening;
- and
- a shaped optical window, the shaped optical window being configured to at least partially protrude into the optical window opening in the support layer and the polishing pad during operation, and the shaped optical window being separated from a side wall of the polishing pad;
- wherein the polishing pad is a polymeric material, the cushioning layer is a polymeric material, and the reinforcement layer is stainless steel.
3 more elements
An optical window structure, comprising:
- a support layer, the layer including a reinforcement layer and a cushioning layer, the reinforcement layer being stainless steel;
- a polishing pad, the polishing pad being attached to a top surface of the support layer;
- an optical window opening;
- and
- a shaped optical window, the shaped optical window being configured to at least partially protrude into the optical window opening in the support layer and the polishing pad during operation, and the shaped optical window being separated from a side wall of the polishing pad.
2 more elements
An optical window structure, comprising:
- a multi-layer polishing pad;
- an optical window opening:
- and
- a shaped optical window, the shaped optical window being configured to at least partially protrude into the optical window opening in the multi-layer polishing pad, and the shaped optical window being separated from a side wall of the polishing pad,
- wherein a polishing layer of the multi-layer polishing pad is secured to a support layer through direct casting of polyurethane on the support layer, and the multi-layer polishing pad includes at least one of a stainless steel reinforcement layer and a kevlar-type reinforcement layer.
2 more elements
Dependencies are inferred from the claim text.