Slurry distributor
AssigneeProMOS Technologies Inc.
InventorsChien-Ping Lien, Ching-Feng Tsai
Life of this patent
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Abstract
A slurry distributor having a base section, a main body section, a distributing structure (sidewall section) and a connecting structure. The main body section is above the base section and the distributing structure is above the main body section. The distributing structure accommodates one or more types of slurry, mixes up the different slurry types and channels out the well-mixed slurry. The distributing structure also has a plurality of holes close to the main body section. The connecting structure is inside the base section for engaging with a chemical-mechanical polishing installation.
Claims13
A slurry distributor, comprising:
- a base section;
- a main body section on top of the base section;
- a distributing structure on top of the main body section for accommodating one or more types of slurry, mixing the slurry and pouring out the well-mixed slurry uniformly, wherein the distributing structure has a plurality of holes close to the main body section;
- and
- a connecting structure inside the base section for joining with a chemical-mechanical polishing device.
A slurry distributor, comprising:
- a base section having a cylindrical body;
- a main body section above the base section, including:
- a lower main body section;
- and
- an upper main body section above the lower main body section;
- and
- a sidewall section above the main body section to prevent out-splashing of slurry and channel out well-mixed slurry, wherein the sidewall section is a cylindrical ring and has a plurality of holes close to the main body section.
Dependencies are inferred from the claim text.