Method for separating slices from a hard brittle workpiece, and wire saw for carrying out the method
AssigneeWacker Siltronic Gesellschaft fur Halbleitermaterialien AG
InventorsKarl Egglhuber, Jörg Lukschandel
Life of this patent
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Abstract
A method for separating slices from a hard brittle workpiece involves subjecting the workpiece to an advancing movement and pressing it onto wires of a wire web of a wire saw, the wires being under a defined wire tension and making contact with the workpiece over a cutting depth along a cutting contour. The wires are lifted off the cutting contour an number of times while the wire tension is kept substantially unchanged, with the aid of rolls of a roll system. The roll system comprises at least one roll that is moved onto the wire web and back, the roll system comprising at least two moveable rolls which flank the workpiece. A wire saw is suitable for carrying out the method.
Claims19
A method for separating slices from a hard brittle workpiece, comprising:
- subjecting the workpiece to an advancing movement;
- pressing the workpiece onto wires of a wire web of a wire saw, the wires being under a defined wire tension and making contact with the workpiece over a cutting depth along a cutting contour;
- and
- lifting the wires off the cutting contour a number of times while the wire tension is kept substantially unchanged, with the aid of rolls of a roll system, said step of lifting comprising moving at least one roll in a direction toward the wire web and then in a direction away from the wire web, wherein the roll system comprises at least two moveable rolls which flank the workpiece.
A wire saw having a wire web for separating slices from a hard brittle material, said wire saw comprising a roll system which comprises at least two rolls which flank the workpiece and are moved in a direction toward the wire web and in a direction away from the wire web.
Dependencies are inferred from the claim text.