Dresser, polishing apparatus and method for producing an article
AssigneeKabushiki Kaisha Toshiba
InventorsEijiro Koike, Yasutada Nakagawa, Masatoshi Higuchi
Life of this patent
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Abstract
A polishing apparatus comprise a lower surface plate rotatably provided and having a polishing surface for polishing an object, and an upper surface plate for pressing the object against the lower surface plate, wherein the polishing surface can be dressed by a dresser comprising a dressing member approachable to and separable from the polishing surface, the dressing member having a dressing surface to be brought into contact with the polishing surface, the dressing surface being shaped as a hollow oval.
Claims5
A dresser comprising a dressing member having a dressing surface to be brought into contact with a polishing surface of a polishing apparatus, the dressing surface being shaped as a hollow oval, wherein:
- at least one recess is formed on the dressing surface at the intersections of the oval and its major and minor axes;
- the dressing member is rotatable about a rotation axis;
- and
- the recess is formed to separate the dressing surface in portions of the dressing member farthest from the rotation axis.
Dependencies are inferred from the claim text.