Capacitive pressure sensor with multiple capacitive portions

A capacitive pressure sensor comprising:

• a substrate;
• a first capacitive portion including a first lower electrode on a surface of said substrate and a first upper electrode facing said first lower electrode with a first cavity space between said first lower electrode and said first upper electrode, said first upper electrode being supportable by said substrate to define a first diaphragm structure;
• a second capacitive portion including a second lower electrode on said surface of said substrate and a second upper electrode facing said second lower electrode with a second cavity space between said second lower electrode and said second upper electrode, said second upper electrode being supportable by said substrate to define a second diaphragm structure;
• and
• a communicating structure for providing fluid communication between said first and second cavity spaces, wherein said second capacitive portion is so arranged as to surround said first capacitive portion, said first upper electrode, at an outer circumference, is connected to said second upper electrode at an inner circumference, said first cavity space is connected to said second cavity space, and said capacitive sensor further comprises a supporting member between said first and second upper electrodes to support said outer circumference of said first upper electrode and said inner circumference of said second upper electrode to suppress position variation of the second upper electrode, wherein said communication structure is formed in said supporting member.