Ultrasonic probe, method of manufacturing the same and ultrasonic diagnosis apparatus

An ultrasonic probe comprising:

• a plurality of first layer-built vibrators each of which includes first internal electrodes, second internal electrodes arranged corresponding to the first internal electrodes, first piezoelectric vibrators formed between the first internal electrodes and the second internal electrodes, a first external electrode connected to the first internal electrodes, and a second external electrode connected to the second internal electrodes and each of which generates an ultrasound wave in a first frequency band;
• a plurality of second layer-built vibrators each of which includes third internal electrodes, fourth internal electrodes arranged corresponding to the third internal electrodes, second piezoelectric vibrators formed between the third internal electrodes and the fourth internal electrodes, a third external electrode connected to the first internal electrodes, and a fourth external electrode connected to the second internal electrodes and each of which generates an ultrasound wave in a second frequency band;
• a plurality of substrates each of which includes first base-electrodes arranged at predetermined intervals and connected to the first or third external electrode, and includes second base-electrodes arranged corresponding to the first base-electrodes and connected to the second or fourth external electrode;
• and
• a holder which holds the plurality of substrates at regular intervals in such a manner to arrange the plurality of layer-built vibrators in a matrix arrangement.

A method of manufacturing an ultrasonic probe comprising:

• forming electrodes on first and second surfaces of each of piezoelectric plates;
• laminating the piezoelectric plates and connecting the electrodes together, thereby forming a first laminated member in which the piezoelectric plates and the electrodes are alternately stacked;
• forming a plurality of first external electrodes and a plurality of second external electrodes on a first side surface which is along a lamination direction, at predetermined pitches, the first external electrodes being used for connecting even-numbered ones of the electrodes, and the second external electrodes being used for connecting odd-numbered ones of the electrodes;
• subjecting the piezoelectric plates to polarization processing;
• cutting the first lamination member into pieces along planes that are between positions of the pitches, thereby obtaining a plurality of layer-built vibrators;
• arranging the layer-built vibrators in an array along one side of a plurality of substrates in such a manner that the first external electrodes are electrically connected to first base-electrodes and the second external electrodes are electrically connected to second base-electrodes, the first base-electrodes and the second base-electrodes being arranged at a predetermined pitch on the substrate;
• and
• forming an ultrasonic wave transmission-reception surface by holding the plurality of substrates at regular intervals in such a manner as to arrange the plurality of layer-built vibrators in a matrix arrangement.