Method for producing surface acoustic wave sensors and such a surface acoustic wave sensor
AssigneeForschungszentrum Karlsruhe GmbH
InventorsMichael Rapp, Ullrich Stahl
Life of this patent
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Abstract
In a method for producing surface wave sensors on the basis of a surface wave building component a polymer parylene film with a thickness of 20 to 200 nm is applied to a hydrophilic sensor surface of the surface wave building component by deposition from the gas phase, whereby the hydrophilic sensor surface becomes hydrophobic, the surface is then subjected to plasma activation to render it hydrophilic and a hydrophilic sorption polymer layer is then applied to the parylene film so as to provide a surface wave sensor with a homogenous sorption polymer layer.
Claims6
A method for producing surface wave sensors on the basis of a surface wave building component comprising the following steps:
- applying a polymer parylene film with a thickness of 20 to 200 nm to a sensor surface of the surface wave building component which is hydrophilic, by deposition from the gas phase, whereby the hydrophilic sensor surface becomes hydrophobic,
- rendering the parylene film surface hydrophilic by plasma activation, and
- depositing on the parylene film a hydrophilic sorption polymer layer by spray coating or drip-coating.
A surface wave sensor on the basis of surface wave building components, having a polymer parylene film with a thickness of between 20 and 200 nm on a surface of the surface wave building component, which is applied by deposition from the gas phase, and a hydrophilic sorption polymer layer on the parylene film, which is applied by spray coating or drip-coating after the parylene film has been hydrophilized by means of plasma activation.
Dependencies are inferred from the claim text.