Method for forming a micro-pattern
AssigneeCanon Kabushiki Kaisha
InventorsRyo Kuroda, Hiroshi Matsuda, Kiyoshi Takimoto
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Abstract
The method of forming a micro-pattern comprising forming an organic thin film by building up monomolecular films on an insulating substrate; heating and baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film; and processing the organic thin film by conducting a microcutting work on it while holding a probe in contact with the organic thin film by means of atomic force to produce the micro-pattern.
Claims5
A method of forming an electroconductive micro-pattern on an insulating substrate, comprising the steps of:
- forming an organic thin film by building up monomolecular films on a surface of the insulating substrate;
- baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film;
- and
- processing the electroconductive thin film by performing a micro-cutting operation thereon to form the electroconductive micro-pattern,
- wherein the electroconductive thin film provided in the baking step is reduced in thickness to ½ to ¼ as compared to the thickness of the organic thin film before the baking step, the film thickness being smaller than a width of the micro-pattern, and has a lower hardness than the insulating substrate, and
- wherein the micro-cutting operation comprises a step of causing a relative motion of a probe having a tip with respect to and along the surface of the insulating substrate while applying a contact force on the probe to such an extent that the tip moves into the electroconductive thin film until the tip gets to the surface of the insulating substrate, thereby to cut the electroconductive film.
Dependencies are inferred from the claim text.