Method of fabricating shaped springs
AssigneeFormFactor, Inc.
InventorsGaetan L. Mathieu, Benjamin N. Eldridge, Stuart W. Wenzel
Life of this patent
Estimating the term…
Abstract
A method of fabricating and using an interconnection element that includes a first element material adapted to be coupled to a substrate and a second element material comprising a material having a transformable property such that upon transformation, a shape of the interconnection is deformed. An example is a material that has a transformable property such that a volume of the first and/or second element material may undergo a thermal transformation from one volume to a different volume (such as a smaller volume) resulting in the deformation of the interconnection element.
Claims24
A method comprising:
- introducing an interconnection element coupled to a substrate, the interconnection element comprising a first element material and a second element material, wherein the first element material is different from the second element material;
- releasing the interconnection element from the substrate at one end;
- and
- transforming a property of one of the first element material and the second element material to modify the shape of the interconnection element after the one end of the interconnection element has been released from the substrate.
A method comprising:
- introducing an interconnection element coupled to a substrate, the interconnection element comprising a first element material and a second element material;
- releasing the interconnection element from the substrate at one end;
- and
- transforming a property of one of the first element material and the second element material to modify the shape of the interconnection element, wherein transforming comprises biasing an end of the interconnection element from a first position to a second position that is a greater distance from a surface of the substrate than the first position.
Dependencies are inferred from the claim text.