Segmented contactor
AssigneeFormFactor, Inc.
InventorsMohammad Eslamy, David V Pedersen, Harry D. Cobb
Life of this patent
Estimating the term…
Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
Claims40
A method of fabricating a segmented contactor comprising:
- forming a contactor unit having electrically conductive areas to contact conductive areas of a device on a wafer to enable testing the device;
- testing electrically said contactor unit;
- and
- assembling said contactor input which passed said testing with a substrate tat supports another contactor unit to form said segmented contactor, wherein the step of assembling comprises:
- providing an assembly fixture including a plate defining a contactor position;
- placing said contactor unit having a first side and a second side into said contactor position with said first side facing said plate;
- and
- attaching the second side of said contactor unit to said substrate.
A method of fabricating a segmented contactor comprising:
- forming a plurality of contactor units on a single contactor substrate, the contactor units having electrically conductive areas to contact conductive areas of devices on a wafer to enable testing the devices;
- testing electrically each of said contactor units;
- separating each of said contactor units from said single contactor substrate;
- and
- assembling said contactor units which have passed said testing to form said segmented contactor, wherein the step of assembling comprises:
- providing an assembly fixture including a plate defining contactor positions;
- placing one of said contactor units having a first side and a second side into a corresponding one of said contactor positions with said first side facing said plate;
- and
- attaching a backing substrate to the second side of said contactor unit.
The method of fabricating a segmented contactor comprising:
- forming a plurality of contactor units on a single contactor substrate, wherein the contactor units have electrically conductive areas to contact conductive areas of devices on a wafer to enable testing the devices;
- attaching a plurality of electrically conductive leads to one of said plurality of contactor units, wherein said plurality of electrically conductive leads extend horizontally beyond an edge of said one of said plurality of contactor units to enable connecting the leads to an external testing device;
- testing each of said contactor units;
- separating each of said contactor units from said single contactor substrate;
- and
- assembling said contactor units which have passed said testing to form said segmented contactor, wherein said step of assembling comprises:
- providing an assembly fixture including a plate defining contactor positions;
- placing one of said contactor units having a first side and a second side into a corresponding one of said contactor positions with said first side facing said plate;
- and
- attaching a backing substrate to the second side of the contactor unit.
Dependencies are inferred from the claim text.