Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework
AssigneeAdvanced Micro Devices, Inc.
InventorsMichael L. Miller, Elfido Coss, Jr.
Life of this patent
Estimating the term…
Abstract
A method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework. It is determined which lot of processing pieces that is to be processed by a processing tool and the lot of processing pieces is retrieved from a remote location. A predefined set of calculations is initiated relating to the operation of the processing tool in anticipation of delivering the lot of processing pieces to the processing tool. The lot of processing pieces is delivered to the processing tool, and the processing pieces are processed by the processing tool using the predefined set of calculations.
Claims21
A method, comprising:
- determining a lot of processing pieces that is to be processed by a processing tool;
- retrieving the lot of processing pieces from a remote location;
- initiating a predefined set of calculations relating to the operation of the processing tool in anticipation of delivering the lot of processing pieces to the processing tool;
- delivering the lot of processing pieces to the processing tool;
- and
- processing the processing pieces by the processing tool using the predefined set of calculations.
A system, comprising:
- a processing tool adapted to process a lot of processing pieces;
- a first controller adapted to retrieve the lot of processing pieces from a remote location;
- a second controller adapted to control the processing tool and to determine the lot of processing pieces that is to be processed by the processing tool;
- and
- a third controller adapted to perform a predefined set of calculations relating to the operation of the processing tool, wherein said third controller initiates performance of the predefined set of calculations prior to receipt of the lot of processing pieces at the processing tool;
- and
- wherein the processing tool is further adapted to process the processing pieces using the predefined set of calculations in response to the processing pieces being delivered to the processing tool.
A system, comprising:
- means for determining a lot of processing pieces that is to be processed by a processing tool;
- means for retrieving the lot of processing pieces from a remote location;
- means for performing a predefined set of calculations relating to the operation of the processing tool in anticipation of delivering the lot of processing pieces to the processing tool;
- means for delivering the lot of processing pieces to the processing tool;
- and
- means for processing the processing pieces by the processing tool using the predefined set of calculations.
Dependencies are inferred from the claim text.