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US 6,639,930 B2Granted
Multi-level closed loop resonators and method for fabricating same
AssigneePrinceton Lightwave, Inc.
InventorsGiora Griffel, Raymond J. Menna, Joseph H. Abeles, John C. Connolly
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Abstract
A closed-loop ring resonator including a closed loop formed on a substrate and including at least one coupling region having a first effective depth and at least one other region having a second effective depth, wherein the first and second depths are different.
Claims15
A closed-loop ring resonator comprising:
- a closed loop ring formed on a substrate defined by grooves within said substrate, said ring comprising:
- at least one coupling region having a first effective depth;
- and
- at least one non-coupling region having a second effective depth operative to reduce bending loss, said first and second effective depths being the depths of said grooves defining said resonator wherein said first effective depth is shallower than said second effective depth.
1 more element
A method for fabricating a closed loop resonator, comprising the steps of:
- forming a waveguide on a substrate,
- forming quantum wells including a first and a second layer on said substrate to form a waveguide core,
- forming additional layers on said first and second layers,
- forming a cladding layer on said substrate,
- etching said substrate to define a first waveguide structure with another etch not extending into the waveguide region defining a resonator, whereby etched depth levels of said other etch is different than the depth level of said waveguide structure to increase coupling between signals from said waveguide to said another etch region.
2 more elements
Dependencies are inferred from the claim text.