Pulse oscillating gas laser device

A pulse oscillating gas laser device for exciting a laser gas by causing primary discharge in a pulse form between a pair of discharge electrodes opposing each other and oscillating laser light,

• wherein a rib portion with insulating properties for preventing creeping discharge is provided on a cathode base with insulating properties to which the discharge electrode at a high voltage side of said pair of discharge electrodes is fixed,
• wherein a damping material for attenuating a shock wave caused by the primary discharge is inserted in an inside of a groove portion between a raised portion of said rib portion and said high-voltage side discharge electrode, and
• wherein a damping material having a slant raised toward the discharge electrode at a grounding side is provided in an outer periphery of said grounding side discharge electrode of said pair of discharge electrodes.

A pulse oscillating gas laser device for exciting a laser gas by causing primary discharge in a pulse form between a pair of discharge electrodes opposing each other and oscillating laser light, comprising:

• a rib portion with insulating properties for preventing creeping discharge is provided on a cathode base with insulating properties, to which the discharge electrode at a high voltage side of the pair of said discharge electrodes is fixed, and
• wherein said portion is formed not in parallel with said high-voltage side discharge electrode in a longitudinal direction of said high-voltage side discharge electrode around the portion of said cathode base where said high-voltage side discharge electrode is fixed.