Magneto-resistance effect type composite head and production method thereof

A method of manufacturing a magneto-resistance effect composite head, comprising the sequential steps of:

• forming a first magnetic shield on a slider;
• forming a ferromagnetic tunnel junction magneto-resistance effect (hereinafter, referred to as TMR) element on the first magnetic shield,
• the TMR element having a center region comprised of a TMR film and an end region for applying a bias magnetic field to the TMR film;
• forming a second magnetic shield overlying the TMR film and the end region,
• said step of forming the TMR element comprising the sequential steps of:
• forming the TMR film by
• forming a first ferromagnetic layer,
• forming, on the first ferromagnetic layer, a tunnel barrier layer,
• forming, on the tunnel barrier layer, a second ferromagnetic layer,
• forming, on the second ferromagnetic layer, an antiferromagnetic film,
• after forming the TMR film, forming a non-magnetic insulation layer contacting an upper surface of the first magnetic shield and inclined vertical sides of the TMR film, the non-magnetic insulation being vertically tapered along the inclined vertical sides of the TMR film,
• forming a permanent magnet layer contacting the non-magnetic insulation layer, the permanent magnet layer being vertically tapered along the inclined vertical sides of the TMR film,
• the vertical sides of the TMR film being coated with the non-magnetic insulation layer before formation of the permanent magnet layer to prevent electrical short-circuiting between the first and second ferromagnetic layers separated by the tunnel barrier layer.