Back to results
US 6,639,726 B1Granted
Microlenses with spacing elements to increase an effective use of substrate
AssigneeMicron Technology, Inc.
InventorScott Patrick Campbell
Life of this patent
Estimating the term…
Abstract
A system of changing lensing effect of microlenses on a substrate, by forming indentations in the substrate, which effect the microlenses, by either carrying out a lensing effect, or by changing the shape of the eventual microlens.
Claims25
A system, comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations, each indentation defining an area surrounding one of said pixels.
A system, comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations therein at areas surrounding said pixels, wherein said indentations are troughs that are roughly in the shape of an intersection of two spheres.
A system, comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations therein at areas surrounding said pixels wherein said indentations are of a shape which provides a lensing effect to incoming light, wherein said indentations have portions which are substantially round in cross section.
A system, comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations, each indentation defining an area surrounding one of said pixels further comprising a microlens, formed on a flat portion of said layer, wherein said microlens has an outer shape which is substantially continuous with a shape of said indentations.
A system comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations, each indentation defining an area surrounding one of said pixels further comprising a microlens, formed on a flat portion of said layer, wherein said indentations have a substantially lowest portion at an intersection between adjacent pixels.
A system, comprising:
- an image sensor structure, having a plurality of image sensing pixels in a substrate;
- and
- a layer provided over said plurality of image sensing pixels, said layer having a top surface with a plurality of indentations, each indentation defining an area surrounding one of said pixels, wherein said indentations are at locations to affect a shape of the microlens during melting.
An image sensor, comprising:
- a plurality of pixels, each said pixel including a light sensitive structure, formed in the semiconductor substrate;
- a layer provided over said pixels, and including a top surface, said top surface including flat portions, and indentations portions between said flat portions;
- and
- a plurality of microlenses, respectively formed on said flat portions, and each microlens being adjacent to at least one indentations portion.
1 more element
An image sensor, comprising:
- a plurality of pixels, each said pixel including a light sensitive structure, formed in a semiconductor substrate;
- a layer provided over more than one of said pixels, and including a top surface, said top surface including flat portions, and indentation portions between said flat portions;
- and
- a plurality of microlenses, respectively formed on said flat portions, and each microlens being adjacent to at least one indentation portion, wherein said indentations are troughs with a shape that affects a melting of the microlenses during a formation process.
1 more element
An image sensor, comprising:
- a plurality of pixels, each said pixel including a light sensitive structure, formed in a semiconductor substrate;
- a layer provided over more than one said pixels, and including a top surface, said top surface including a flat portion, and indentation portions between said flat portions;
- and
- a plurality of microlenses, respectively formed on said flat portions, and each microlens being adjacent to at least one indentation portion, wherein said indentation portions have a substantially lowest portion in the substrate at a midpoint between adjacent pixels.
1 more element
An image sensor, comprising:
- a plurality of pixels, each said pixel including a light-sensitive structure, formed in this semiconductor substrate;
- a covering layer, covering said pixels, and including a top surface, said top surface including flat portions, and indentation portions between said flat portions;
- and
- a plurality of microlenses, respectively formed on said flat portions, and each microlens being adjacent at least one indentation portion, wherein said indentations have a substantially lowest spot on the substrate at a midpoint between adjacent pixels.
1 more element
A method, comprising:
- forming an image sensor with a plurality of light-sensitive pixels;
- covering more than one of said plurality of light sensitive pixels with a layer;
- and
- shaping said layer in a way to effect a lensing operation.
1 more element
Dependencies are inferred from the claim text.