Device having a barrier layer located therein and a method of manufacture therefor
AssigneesLucent Technologies Inc., Agere Systems Optoelectronics Guardian Corp.
InventorsJohn Eric Bower, Michal E. Gross, Sungho Jin, Hareesh Mavoori, Ainissa Ramirez
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Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.
Claims20
For use with a micro-electro-mechanical system (MEMS) optical device, a device comprising a mirror wherein the mirror comprises:
- a substrate having opposing first and second sides;
- a first diffusion barrier layer located over the first side;
- a second diffusion barrier layer located over the second side;
- a stress balancing layer located over the second diffusion barrier layer;
- and
- a light reflective optical layer located over the first diffusion barrier layer.
A method of manufacturing a micro-electro-mechanical system (MEMS) optical device, comprising:
- forming a substrate having opposing first and second sides;
- forming a first diffusion barrier layer over the first side
- forming a second diffusion barrier layer over the second side;
- forming a stress balancing layer over the second diffusion barrier layer;
- and
- forming a light reflective optical layer over the first diffusion barrier layer.
A micro-electro-mechanical system (MEMS) optical device, comprising:
- a mirror, including;
- a substrate having opposing first and second sides;
- a first diffusion barrier layer located over the first side;
- a second diffusion barrier layer located over the second side;
- a stress balancing layer located over the second diffusion barrier layer;
- and
- a light reflective optical layer located over the first diffusion barrier layer;
- one or more actuating electrodes configured to controllably move the mirror;
- and a spacer which separates the mirror and the actuating electrodes.
Dependencies are inferred from the claim text.