Packaged micromirror assembly with in-package mirror position passive component feedback

An electronic system, comprising:

• a data source, for generating data to be communicated to a receiver;
• and
• a transmitter optical module, comprising:
• a light source, coupled to the data source, for generating a modulated directed light beam;
• and
• a packaged micromirror assembly for directing the directed light beam at the receiver, comprising:
• a mirror element formed of a single piece of crystalline material, the mirror element having a frame, a mirror surface, and a plurality of hinges;
• at least one permanent magnet attached to the mirror element;
• a plurality of coil drivers, in proximity to the at least one permanent magnet, for orienting the mirror element;
• a body encasing the plurality of coil drivers, and to which the mirror element is attached;
• and
• a sensor, disposed between the body and the mirror element, for detecting the orientation of the mirror, the sensor comprising a plurality of segmented capacitor plates angularly arranged beneath and spaced apart from an underside of the mirror surface, the plurality of segmented capacitor plates being electrically insulated from one another.

A method of transmitting data signals, comprising:

• generating a modulated light beam;
• orienting a micromirror to reflect the modulated light beam from an upper surface of the micromirror to a receiver;
• and
• measuring a capacitance between the micromirror at a plurality of locations beneath the micromirror to detect the orientation of the micromirror, wherein the capacitance measuring step comprise:
• applying a high frequency signal between the micromirror and a plurality of segments arranged at a surface of a conical structure underlying the micromirror;
• measuring the capacitance between each of the plurality of segments and the micromirror.

A mirror assembly comprising:

• a mirror element having a frame, a mirror surface, and a plurality of hinges;
• at least one permanent magnet attached to the mirror element;
• a plurality of coil drivers in proximity to at least one permanent magnet for orienting the mirror element;
• a body holding a plurality of coil drivers, and to which the mirror element is attached;
• and
• a sensor disposed between the body and the mirror element for detecting the orientation of the mirror, the sensor being of a conical shape and comprising a plurality of segmented capacitor plates angularly arranged beneath and spaced apart from an underside of the mirror surface, the plurality of segmented capacitor plates being angularly disposed at upper conical surfaces of the sensor, and electrically insulated from one another.

A packaged micro-machined electro-mechanical assembly comprising:

• an element having capacitive properties and a surface;
• a body encasing the assembly;
• and
• a sensor disposed between the body and the element for detecting the orientation of the element, the sensor being of a conical shape and comprising a plurality of segmented capacitor plates angularly arranged beneath and spaced apart from an underside of the element surface, the plurality of segmented capacitor plates being angularly disposed at upper conical surfaces of the sensor, and electrically insulated from one another.