Microelectromechanical RF switch
AssigneeNorthrop Grumman Corporation
InventorNathan Bluzer
Life of this patent
Estimating the term…
Abstract
A MEMS switch with a bridge having three symmetric arms each having one end connected to a support arrangement and another end integral with a common central bridge portion. First and second conductors are deposited on a substrate, with the first conductor having an end with an open area which encompasses a pull down electrode which is also on the substrate, and of a height less than that of the conductor. A control voltage applied to the pull down electrode causes downward movement of the bridge, to present a relatively low impedance, thereby allowing a signal to propagate between the first and second conductors, without the bridge touching the pull down electrode. Each of the arms is slotted to reduce curl-induced stiffness.
Claims11
A MEMS switch comprising:
- a) a substrate member;
- b) first and second spaced-apart RF conductors deposited on said substrate;
- c) a support arrangement on said substrate;
- d) a bridge member having at least three radially disposed arms of equal length, each said arm having one end connected to said support arrangement and a second end integral with a common central bridge portion having an undersurface;
- e) at least one of said arms being electrically connected to said second conductor;
- f) said first conductor having an end portion facing said undersurface of said central bridge portion;
- g) said end portion of said first conductor being constructed and arranged to define an open area;
- h) a pull down electrode disposed within said open area of, and electrically isolated from, said first conductor, and being of a height less than that of said end portion of said first conductor;
- i) said central bridge portion being drawn toward said first conductor upon application of a control voltage to said pull down electrode, to present a relatively low impedance, allowing a signal to propagate between said first and second conductors.
Dependencies are inferred from the claim text.